Title:
PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2018/042946
Kind Code:
A1
Abstract:
Provided are a piezoelectric film having high piezoelectric characteristics and a piezoelectric element provided with the piezoelectric film. In the piezoelectric film that includes a perovskite-type oxide represented by general formula P, 0.1≤x≤0.3 and 0
Inventors:
MURAKAMI NAOKI (JP)
SAWAKI DAIGO (JP)
SAWAKI DAIGO (JP)
Application Number:
PCT/JP2017/026703
Publication Date:
March 08, 2018
Filing Date:
July 24, 2017
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L41/187; C01F17/32; C01G25/00; C01G33/00; C23C14/08; H01L41/09; H01L41/316
Foreign References:
| JP2013157479A | 2013-08-15 | |||
| JP2009054994A | 2009-03-12 | |||
| JP2000281439A | 2000-10-10 | |||
| JP2005353755A | 2005-12-22 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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