Title:
PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2021/010244
Kind Code:
A1
Abstract:
This piezoelectric film contains an iron-containing potassium sodium niobate represented by general formula (1), and contains granular crystal particles having an average aspect ratio of 3 or less. Formula (1): (KxNa1–x)a(FeyNbz)O3
In formula (1), x is such that 0 < x < 1, a is such that 0.90 < a ≤ 1, and y and z are such that y + z = 1 and 0.006 ≤ y/z ≤ 0.04.
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Inventors:
TSUJIUCHI NAOTO (JP)
SOYAMA NOBUYUKI (JP)
SOYAMA NOBUYUKI (JP)
Application Number:
PCT/JP2020/026652
Publication Date:
January 21, 2021
Filing Date:
July 08, 2020
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
H01L41/187; H01L41/318; H01L41/43
Domestic Patent References:
| WO2015033791A1 | 2015-03-12 |
Foreign References:
| JP2013225605A | 2013-10-31 | |||
| JP2012121273A | 2012-06-28 | |||
| JP2012124354A | 2012-06-28 | |||
| JP2015534257A | 2015-11-26 | |||
| JP2019130521A | 2019-08-08 |
Other References:
See also references of EP 3972000A4
Attorney, Agent or Firm:
MATSUNUMA Yasushi et al. (JP)
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