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Title:
PIEZOELECTRIC FILM SENSOR AND HOLDING STATE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/194690
Kind Code:
A1
Abstract:
This piezoelectric film sensor (20) is provided with: an insulating substrate (22) on at least one primary surface of which a first electrode (21) is formed; a piezoelectric film (24) which has a first principle surface and a second principle surface, said first principle surface being provided facing the first electrode (21); and a conductive thin-film member (25) which is provided on the aforementioned second primary surface. The piezoelectric film sensor (20) is characterized in that the aforementioned first primary surface is arranged facing a pressing surface.

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Inventors:
KIHARA TAKASHI (JP)
YAMAGUCHI YOSHIHIRO (JP)
ENDO JUN (JP)
ISHIURA YUTAKA (JP)
HAYASHI SHIGETOSHI (JP)
ISONO FUMIYA (JP)
Application Number:
PCT/JP2016/065240
Publication Date:
December 08, 2016
Filing Date:
May 24, 2016
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L1/16; G01L5/00
Foreign References:
JP5689523B12015-03-25
JP2007521569A2007-08-02
US20020045838A12002-04-18
JPH0629587A1994-02-04
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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