Title:
PIEZOELECTRIC MEMBER, ELASTIC WAVE APPARATUS, AND PIEZOELECTRIC MEMBER MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2014/087799
Kind Code:
A1
Abstract:
Provided is a piezoelectric member having a high sound speed.
A piezoelectric member (1a) is provided with a silicon-containing substrate (10), and a piezoelectric layer (11). The piezoelectric layer (11) is disposed on the silicon-containing substrate (10). The piezoelectric layer (11) has at least a surface layer formed of BxAl1-xN (0
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Inventors:
UMEDA KEIICHI (JP)
HONDA ATSUSHI (JP)
TANAKA ATSUSHI (JP)
OMURA MASASHI (JP)
AKIYAMA MORITO (JP)
HONDA ATSUSHI (JP)
TANAKA ATSUSHI (JP)
OMURA MASASHI (JP)
AKIYAMA MORITO (JP)
Application Number:
PCT/JP2013/080269
Publication Date:
June 12, 2014
Filing Date:
November 08, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
International Classes:
H03H9/25; C30B29/38; H01L41/09; H01L41/18; H01L41/187; H03H3/02; H03H3/08; H03H9/17
Domestic Patent References:
| WO2010095640A1 | 2010-08-26 |
Foreign References:
| JPH07315998A | 1995-12-05 | |||
| JPH08239752A | 1996-09-17 | |||
| JP2010087578A | 2010-04-15 | |||
| JPH088182A | 1996-01-12 | |||
| JPH08310900A | 1996-11-26 | |||
| JPH10506234A | 1998-06-16 | |||
| JP2002176331A | 2002-06-21 | |||
| JP2005265423A | 2005-09-29 | |||
| JP2010123818A | 2010-06-03 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
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