Title:
PIEZOELECTRIC MEMBRANE, INKJET HEAD, METHOD USING AN INKJET HEAD TO FORM IMAGES, ANGULAR-VELOCITY SENSOR, METHOD USING AN ANGULAR-VELOCITY SENSOR TO MEASURE ANGULAR VELOCITY, PIEZOELECTRIC GENERATION ELEMENT, AND ELECTRICITY-GENERATION METHOD USING PIEZOELECTRIC GENERATION ELEMENTS
Document Type and Number:
WIPO Patent Application WO/2011/158491
Kind Code:
A1
Abstract:
Disclosed is a piezoelectric membrane that contains a lead-free ferroelectric material and exhibits low dielectric loss and piezoelectric performance as high as that of PZT. Also disclosed is a method for manufacturing said piezoelectric membrane. Said piezoelectric membrane is provided with a (110)-oriented (NaxBiy)TiO0.5
x
+1.5
y
+2-BaTiO3 layer (with 0.30 ≤ x
≤ 0.46 and 0.51 ≤
y ≤ 0.62).
Inventors:
HARIGAI, Takakiyo (())
張替 貴聖 (())
TANAKA, Yoshiaki (())
田中 良明 (())
張替 貴聖 (())
TANAKA, Yoshiaki (())
田中 良明 (())
Application Number:
JP2011/003362
Publication Date:
December 22, 2011
Filing Date:
June 14, 2011
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
HARIGAI, Takakiyo (())
張替 貴聖 (())
TANAKA, Yoshiaki (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
HARIGAI, Takakiyo (())
張替 貴聖 (())
TANAKA, Yoshiaki (())
International Classes:
H01L41/22; B41J2/16; C23C14/08; G01C19/56; G01P9/04; H01L41/08; H01L41/09; H01L41/113; H01L41/187; H02N2/00
Attorney, Agent or Firm:
NAITO, Hiroki et al. (1006 Oaza Kadoma, Kadoma-sh, Osaka 01, 〒5718501, JP)
Claims: