Title:
PIEZOELECTRIC MEMS RESONATOR
Document Type and Number:
WIPO Patent Application WO2004059836
Kind Code:
A3
Abstract:
A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.
Inventors:
DUWEL AMY E (US)
CARTER DAVID J (US)
MESCHER MARK J (US)
VARGHESE MATHEW (US)
ANTKOWIAK BERNARD M (US)
WEINBERG MARC S (US)
CARTER DAVID J (US)
MESCHER MARK J (US)
VARGHESE MATHEW (US)
ANTKOWIAK BERNARD M (US)
WEINBERG MARC S (US)
Application Number:
PCT/US2003/023982
Publication Date:
November 25, 2004
Filing Date:
July 31, 2003
Export Citation:
Assignee:
DRAPER LAB CHARLES S (US)
DUWEL AMY E (US)
CARTER DAVID J (US)
MESCHER MARK J (US)
VARGHESE MATHEW (US)
ANTKOWIAK BERNARD M (US)
WEINBERG MARC S (US)
DUWEL AMY E (US)
CARTER DAVID J (US)
MESCHER MARK J (US)
VARGHESE MATHEW (US)
ANTKOWIAK BERNARD M (US)
WEINBERG MARC S (US)
International Classes:
H01L41/22; H01L41/29; H01L41/332; H03H3/02; H03H9/17; H03H9/56; H03H9/58; (IPC1-7): H03H9/05; H03H9/17; H03H3/02
Domestic Patent References:
| WO2002081365A2 | 2002-10-17 |
Foreign References:
| EP0096653A2 | 1983-12-21 |
Other References:
SEKARIC L ET AL: "Nanomechanical resonant structures in silicon nitride : fabrication, operation and dissipation", SENSORS AND ACTUATORS, A, 29 May 2002 (2002-05-29), XP002290949, ISSN: 0924-4247, Retrieved from the Internet [retrieved on 20030902]
PATENT ABSTRACTS OF JAPAN vol. 0081, no. 27 (E - 250) 14 June 1984 (1984-06-14)
PATENT ABSTRACTS OF JAPAN vol. 0081, no. 27 (E - 250) 14 June 1984 (1984-06-14)
Download PDF: