Title:
PIEZOELECTRIC MEMS SPEAKER
Document Type and Number:
WIPO Patent Application WO/2023/245789
Kind Code:
A1
Abstract:
The present utility model provides a piezoelectric MEMS speaker, comprising a substrate having a back cavity, a diaphragm, a capacitor system, and a flexible film. The diaphragm comprises a fixed end and suspended ends, every two adjacent suspended ends are at least partially arranged at an interval to form a slit, and each suspended end comprises a supporting section and a piezoelectric section; the capacitor system comprises a plurality of piezoelectric structures corresponding to the suspended ends, and each piezoelectric structure comprises a first electrode layer, a piezoelectric layer, and a second electrode layer; the projection of the second electrode layer in the thickness direction of the piezoelectric MEMS speaker only covers piezoelectric sections of the diaphragm; the overlapped portions of the first electrode layer, the piezoelectric layer, and the second electrode layer in the thickness direction of the piezoelectric MEMS speaker jointly form a piezoelectric functional area; the flexible film and the diaphragm are located on different planes; in the thickness direction of the piezoelectric MEMS speaker, the flexible film is at least partially spaced apart from the diaphragm, and the flexible film is spaced apart from the substrate. The present utility model can improve the acoustic pressure level of the piezoelectric MEMS speaker at medium/high frequency, and can improve the acoustic performance of the piezoelectric MEMS speaker.
More Like This:
| JP3632978 | Electroacoustic transducer |
| JP4945626 | Flexible luminescent electroacoustic transducer and electronic devices using it |
| WO/2019/213422 | LOUDSPEAKER SYSTEM |
Inventors:
SHEN YU (CN)
ZHOU YIWEI (CN)
DAN QIANG (CN)
LI YANG (CN)
ZHOU YIWEI (CN)
DAN QIANG (CN)
LI YANG (CN)
Application Number:
PCT/CN2022/106847
Publication Date:
December 28, 2023
Filing Date:
July 20, 2022
Export Citation:
Assignee:
AAC KAITAI TECH WUHAN CO LTD (CN)
International Classes:
H04R19/02
Domestic Patent References:
| WO2022048810A1 | 2022-03-10 |
Foreign References:
| CN215581695U | 2022-01-18 | |||
| CN113365196A | 2021-09-07 | |||
| US20200177996A1 | 2020-06-04 |
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (CN)
Download PDF: