Title:
PIEZOELECTRIC OSCILLATION MEMBER AND PRODUCTION METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2016/111038
Kind Code:
A1
Abstract:
The present invention increases the adhesive force that exists between a substrate and an adhesive layer and that hermetically seals a piezoelectric oscillator on the substrate. A piezoelectric oscillation member (40) that is provided with: a lid (30) that has a recessed part (31) and that has a flange part (32) that protrudes to the outside from an opening edge of the recessed part (31); a substrate (10) that has a first region (11A) that faces the recessed part (31), and that has a second region (11B) that faces the flange part (32); a piezoelectric oscillator (20) that is mounted to the first region (11A); and an adhesive layer (50) that bonds the second region (11B) and the flange part (32) so as to hermetically seal the piezoelectric oscillator (20) in a space between the recessed part (31) and the first region (11A). The surface roughness of the second region (11B) is greater than the surface roughness of the first region (11A).
Inventors:
NOTO KAZUYUKI (JP)
Application Number:
PCT/JP2015/074264
Publication Date:
July 14, 2016
Filing Date:
August 27, 2015
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/02; H01L23/02; H03H3/02
Foreign References:
| JP2014197615A | 2014-10-16 | |||
| JPH1051265A | 1998-02-20 | |||
| JP2012074837A | 2012-04-12 | |||
| JP2012074937A | 2012-04-12 | |||
| JP2013171907A | 2013-09-02 | |||
| JP2006319130A | 2006-11-24 | |||
| JP2001308213A | 2001-11-02 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Yoshiyuki Inaba (JP)
Yoshiyuki Inaba (JP)
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