Title:
PIEZOELECTRIC PTZT FILM, AND PROCESS FOR PRODUCING LIQUID COMPOSITION FOR FORMING SAID PIEZOELECTRIC FILM
Document Type and Number:
WIPO Patent Application WO/2016/133045
Kind Code:
A1
Abstract:
A piezoelectric PTZT film which comprises a metal oxide of a perovskite structure containing Pb, Ta, Zr, and Ti, wherein the metal oxide further contains carbon, the content of carbon being 80-800 mass ppm. This process for producing a liquid composition for piezoelectric PTZT film formation comprises: refluxing a Ta alkoxide, a Zr alkoxide, a β-diketone compound, and a diol; adding a Ti alkoxide to the first synthetic liquid obtained by the refluxing, and refluxing the mixture again; adding a Pb compound to the second synthetic liquid obtained by the second refluxing, and furthermore refluxing the mixture; removing the solvent from the third synthetic liquid obtained by the third refluxing; and thereafter diluting the resultant residue with an alcohol to thereby produce the liquid composition for piezoelectric film formation. The liquid composition for piezoelectric PTZT film formation contains the diol and the β-diketone compound in amounts of 7-11 mol and 1.5-3.0 mol, respectively, per mole of the sum of the Ta alkoxide, Zr alkoxide, and Ti alkoxide.
Inventors:
DOI TOSHIHIRO (JP)
SOYAMA NOBUYUKI (JP)
SOYAMA NOBUYUKI (JP)
Application Number:
PCT/JP2016/054292
Publication Date:
August 25, 2016
Filing Date:
February 15, 2016
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP (JP)
International Classes:
H01L41/187; B41J2/14; B41J2/16; C01G35/00; H01L41/318; H01L41/319; H01L41/43
Foreign References:
| JP2006322785A | 2006-11-30 | |||
| JP2009221037A | 2009-10-01 | |||
| JP2003212545A | 2003-07-30 | |||
| JP2003160313A | 2003-06-03 |
Other References:
See also references of EP 3261138A4
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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