Title:
PIEZOELECTRIC SENSOR AND DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/027495
Kind Code:
A1
Abstract:
Provided is a piezoelectric sensor capable of detecting deformation of a subject to be inspected, said deformation being detected on the basis of an electric output corresponding to shear stress applied to a piezoelectric body.
A piezoelectric sensor 1 detects deformation of a subject to be inspected by being fixed to the subject, said piezoelectric sensor being provided with: a piezoelectric body 2, which has first and second main surfaces 1a and 1b, and the longitudinal direction, and in which a polarization axis is in the direction X1 that is parallel to the longitudinal direction; and first and second detection electrodes 4a and 4b, which are formed on the surface of the piezoelectric body 2, and which extend in the direction parallel to the longitudinal direction. Deformation of the subject is detected on the basis of an electric output corresponding to shear stress applied to the piezoelectric body 2.
Inventors:
GENMEI YUYA (JP)
INOUE JIRO (JP)
ICHIMARU MASAYUKI (JP)
INOUE JIRO (JP)
ICHIMARU MASAYUKI (JP)
Application Number:
PCT/JP2015/059927
Publication Date:
February 25, 2016
Filing Date:
March 30, 2015
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01B7/16; H01L41/047; H01L41/053; H01L41/113
Foreign References:
| JPS6253364U | 1987-04-02 | |||
| JPS6281572A | 1987-04-15 | |||
| JPH07253441A | 1995-10-03 | |||
| JP2001066317A | 2001-03-16 | |||
| JP2002162408A | 2002-06-07 | |||
| JPH0955638A | 1997-02-25 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
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