Title:
PIEZOELECTRIC SENSOR AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/261548
Kind Code:
A1
Abstract:
A piezoelectric film which exhibits the property of the polarity of the charge produced when stretching the piezoelectric film in the left-right direction and the polarity of the charge produced when stretching the piezoelectric film in the front-rear direction being opposite one another. When viewed from the vertical direction, the region where the piezoelectric film, an upper electrode and a lower electrode overlap one another is the effective region. The length of the effective region in the left-right direction is longer than the length of the effective region in the front-rear direction. The distance from the right end of the effective region to the right end of the substrate is greater than the distance from the front end of the effective region to the front end of the substrate. One or two of the ends among the right end of the piezoelectric film, the right end of the upper electrode and the right end of the lower electrode is positioned to the right of the right end of the effective region.
Inventors:
ONISHI KATSUKI (JP)
Application Number:
PCT/JP2021/023920
Publication Date:
December 30, 2021
Filing Date:
June 24, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L1/16; G06F3/041; H01L41/113; H01L41/193; H01L41/313
Domestic Patent References:
| WO2015019981A1 | 2015-02-12 | |||
| WO2016208560A1 | 2016-12-29 |
Foreign References:
| JP2019009309A | 2019-01-17 | |||
| JP2017033505A | 2017-02-09 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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