Title:
PIEZOELECTRIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/066157
Kind Code:
A1
Abstract:
This piezoelectric sensor (1) comprises a plurality of piezoelectric elements (10) that each have a piezoelectric layer (11) and a pair of electrode layers (12a, 12b) disposed on the front and back sides of the piezoelectric layer (11) and are disposed so as to be apart from each other in a planar direction, and an elastic material layer (20, 30) that comprises an elastic material having a modulus of elasticity of 10 MPa or less and is provided on at least one side of the plurality of piezoelectric elements (10) in the front-back direction.
Inventors:
YOSHIKAWA HITOSHI (JP)
HONJO YASUHIRO (JP)
HONJO YASUHIRO (JP)
Application Number:
PCT/JP2019/024100
Publication Date:
April 02, 2020
Filing Date:
June 18, 2019
Export Citation:
Assignee:
SUMITOMO RIKO CO LTD (JP)
International Classes:
G01L1/16; G01L5/00; H01L41/113
Foreign References:
| JP2015227839A | 2015-12-17 | |||
| JP2013529803A | 2013-07-22 | |||
| JP2011085435A | 2011-04-28 | |||
| US20160197609A1 | 2016-07-07 |
Attorney, Agent or Firm:
HIGASHIGUCHI Michiaki et al. (JP)
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