Title:
PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, INKJET PRINTER, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2016/190110
Kind Code:
A1
Abstract:
A piezoelectric thin film obtained by adding a donor element to lead zirconate titanate. In the above piezoelectric thin film, the ratio of lead in relation to the total of zirconium and titanium is 105% or higher in terms of the molar ratio. |Ec(+)|/|Ec(–)| is 0.5 to 1.5, where Ec(+) and Ec(–) respectively represent the positive and negative coercive electric fields in polarization-electric field hysteresis.
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Inventors:
MAWATARI KENJI (JP)
Application Number:
PCT/JP2016/064044
Publication Date:
December 01, 2016
Filing Date:
May 11, 2016
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
H01L41/187; B41J2/14; B41J2/16; C04B35/491; C23C14/08; H01L41/09; H01L41/316; H01L41/319
Foreign References:
JP2008270704A | 2008-11-06 | |||
JP2013229510A | 2013-11-07 | |||
JP2014060330A | 2014-04-03 | |||
JP2012124190A | 2012-06-28 | |||
JP2009064859A | 2009-03-26 |
Other References:
See also references of EP 3306687A4
Attorney, Agent or Firm:
SANO PATENT OFFICE (JP)
Patent business corporation Sano patent firm (JP)
Patent business corporation Sano patent firm (JP)
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