Title:
PIEZOELECTRIC THIN FILM DEVICE AND METHOD OF PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/2004/088840
Kind Code:
A1
Abstract:
A piezoelectric thin film device (10) comprising a substrate (12) having a vibration space (20), and a piezoelectric lamination structure (14) formed on the upper surface of the substrate, the piezoelectric lamination structure comprising a piezoelectric film (16) and a lower electrode (15) and an upper electrode (17) which are formed on opposite surfaces thereof, respectively, the vibration space (20) being so formed as to allow the vibration of a vibrating section (23) constituted by including at least part of the piezoelectric lamination structure (14) and part of an insulating layer (13). The vibrating space (20) is composed of a first via hole (21) formed to face the upper surface from the lower surface of the substrate (12) so as to form an intermediate surface (25) in the substrate, and a second via hole (22) formed to face the upper surface of the substrate from an intermediate surface (23) so as to be positioned inside the first via hole (21) as seen vertically.
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Inventors:
NAGAO KEIGO (JP)
NISHIMURA KOSUKE (JP)
YAMADA TETSUO (JP)
OTANI OSAMU (JP)
MATSUZAKI SAKAE (JP)
NISHIMURA KOSUKE (JP)
YAMADA TETSUO (JP)
OTANI OSAMU (JP)
MATSUZAKI SAKAE (JP)
Application Number:
PCT/JP2004/004507
Publication Date:
October 14, 2004
Filing Date:
March 30, 2004
Export Citation:
Assignee:
UBE INDUSTRIES (JP)
NAGAO KEIGO (JP)
NISHIMURA KOSUKE (JP)
YAMADA TETSUO (JP)
OTANI OSAMU (JP)
MATSUZAKI SAKAE (JP)
NAGAO KEIGO (JP)
NISHIMURA KOSUKE (JP)
YAMADA TETSUO (JP)
OTANI OSAMU (JP)
MATSUZAKI SAKAE (JP)
International Classes:
H01L41/08; H01L41/09; H01L41/18; H01L41/22; H01L41/316; H03H3/02; H03H9/10; H03H9/17; H03H9/56; (IPC1-7): H03H9/17; H03H3/02; H01L41/107; H01L41/22
Foreign References:
| JP2003017973A | 2003-01-17 | |||
| JPS5986916A | 1984-05-19 | |||
| JP2001004470A | 2001-01-12 | |||
| JP2002223145A | 2002-08-09 | |||
| JP2002353760A | 2002-12-06 |
Attorney, Agent or Firm:
Yamashita, Johei (Toranomon 40th MT Bldg. 13-1, Toranomon
5-chome, Minato-k, Tokyo, JP)
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