Title:
PIEZOELECTRIC THIN-FILM ELECTROMECHANICAL MICROSYSTEM DEVICE
Document Type and Number:
WIPO Patent Application WO2005078752
Kind Code:
A8
Abstract:
A piezoelectric thin-film electromechanical microsystem (MEMS) device (18) comprising an RF-MEMS switch (14) and a bulk acoustic wave piezoelectric thin-film RF resonator (10) mounted on a substrate (12) provided with an acoustic mirror (28). The resonator comprises a thin film portion (16) between the two metal electrodes (20, 24). The switch (14) comprises a two-layer crossarm with an insulator layer (38) combined with a different portion (36) of the piezoelectric film (18) and having a movable metal contact (50) engageable with stationary metal contacts (46, 48) when the crossarm is bent by a voltage across the control electrodes (40, 42).
Inventors:
DUBOIS MARC-ALEXANDRE (CH)
Application Number:
PCT/EP2005/000430
Publication Date:
October 20, 2005
Filing Date:
January 12, 2005
Export Citation:
Assignee:
SUISSE ELECTRONIQUE MICROTECH (CH)
DUBOIS MARC-ALEXANDRE (CH)
DUBOIS MARC-ALEXANDRE (CH)
International Classes:
H01H1/00; H01H59/00; H03H3/007; (IPC1-7): H01H1/00; H03H3/007
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