Title:
PIEZOELECTRIC THIN-FILM ELEMENT, PROCESS FOR PRODUCING SAME, AND PIEZOELECTRIC THIN-FILM DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/121863
Kind Code:
A1
Abstract:
Disclosed is a piezoelectric thin-film element which comprises a substrate and, disposed thereon, at least a lower electrode, a piezoelectric thin film represented by the general formula (NaxKyLiz)NbO3 (0≤x≤1, 0≤y≤1, 0≤z≤0.2, and x+y+z=1), and an upper electrode, characterized in that the piezoelectric thin film has a crystal structure constituted of a quasi-cubic, tetragonal, or orthorhombic system or has a state in which at least one of those crystal systems is coexistent, that the crystal grains have been oriented preferentially along up to two specific crystallographic axes among those axes, and that with respect to the ratio between (001) components and (111) components, as the oriented crystallographic components, the proportion by volume of the (001) components is 60-100% and the proportion by volume of the (111) components is 0-40%, when the sum of both is taken as 100%.
Inventors:
SUENAGA Kazufumi (C/O HITACHI CABLE, LTD. 14-1 Sotokanda 4-chome, Chiyoda-k, Tokyo 71, 〒1018971, JP)
末永 和史 (〒71 東京都千代田区外神田四丁目１４番１号 日立電線株式会社内 Tokyo, 〒1018971, JP)
SHIBATA Kenji (C/O HITACHI CABLE, LTD. 14-1 Sotokanda 4-chome, Chiyoda-k, Tokyo 71, 〒1018971, JP)
柴田 憲治 (〒71 東京都千代田区外神田四丁目１４番１号 日立電線株式会社内 Tokyo, 〒1018971, JP)
末永 和史 (〒71 東京都千代田区外神田四丁目１４番１号 日立電線株式会社内 Tokyo, 〒1018971, JP)
SHIBATA Kenji (C/O HITACHI CABLE, LTD. 14-1 Sotokanda 4-chome, Chiyoda-k, Tokyo 71, 〒1018971, JP)
柴田 憲治 (〒71 東京都千代田区外神田四丁目１４番１号 日立電線株式会社内 Tokyo, 〒1018971, JP)
Application Number:
JP2010/073006
Publication Date:
October 06, 2011
Filing Date:
December 21, 2010
Export Citation:
Assignee:
HITACHI CABLE, LTD. (14-1, Sotokanda 4-chome Chiyoda-k, Tokyo 71, 〒1018971, JP)
日立電線株式会社 (〒71 東京都千代田区外神田四丁目１４番１号 Tokyo, 〒1018971, JP)
SUENAGA Kazufumi (C/O HITACHI CABLE, LTD. 14-1 Sotokanda 4-chome, Chiyoda-k, Tokyo 71, 〒1018971, JP)
末永 和史 (〒71 東京都千代田区外神田四丁目１４番１号 日立電線株式会社内 Tokyo, 〒1018971, JP)
SHIBATA Kenji (C/O HITACHI CABLE, LTD. 14-1 Sotokanda 4-chome, Chiyoda-k, Tokyo 71, 〒1018971, JP)
日立電線株式会社 (〒71 東京都千代田区外神田四丁目１４番１号 Tokyo, 〒1018971, JP)
SUENAGA Kazufumi (C/O HITACHI CABLE, LTD. 14-1 Sotokanda 4-chome, Chiyoda-k, Tokyo 71, 〒1018971, JP)
末永 和史 (〒71 東京都千代田区外神田四丁目１４番１号 日立電線株式会社内 Tokyo, 〒1018971, JP)
SHIBATA Kenji (C/O HITACHI CABLE, LTD. 14-1 Sotokanda 4-chome, Chiyoda-k, Tokyo 71, 〒1018971, JP)
International Classes:
H01L41/18; C23C14/34; H01L41/08; H01L41/09; H01L41/22; H01L41/24; H03H9/17; G01C19/56; G01P9/04
Attorney, Agent or Firm:
YUI Tohru et al. (21 TOWA BLDG. 3F, 6-1 Iidabashi 4-chome, Chiyoda-k, Tokyo 72, 〒1020072, JP)
Claims:
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