Title:
PIEZOELECTRIC THIN FILM, INKJET HEAD, METHOD FOR FORMING IMAGE USING INKJET HEAD, ANGULAR VELOCITY SENSOR, METHOD FOR DETERMINING ANGULAR VELOCITY USING ANGULAR VELOCITY SENSOR, PIEZOELECTRIC ELECTRICITY-GENERATING ELEMENT, AND METHOD FOR GENERATING ELECTRICITY USING PIEZOELECTRIC ELECTRICITY-GENERATING ELEMENT
Document Type and Number:
WIPO Patent Application WO/2011/045897
Kind Code:
A1
Abstract:
Provided is a lead-free piezoelectric thin film, which comprises a lead-free ferroelectric material and has low dielectric loss, a high electromechanical coupling coefficient, and a similarly high piezoelectric constant as lead zirconate titanate (PZT). The piezoelectric thin film has a (Bi, Na, Ba)TiO3 film formed from the perovskite compound oxide (Bi, Na, Ba)TiO3. The (Bi, Na, Ba)TiO3 film has (001) orientation and further comprises Ag. The Ag/Ti molar ratio of the (Bi, Na, Ba)TiO3 film is between 0.001 and 0.01.
Inventors:
HARIGAI TAKAKIYO
ADACHI HIDEAKI
FUJII EIJI
ADACHI HIDEAKI
FUJII EIJI
Application Number:
PCT/JP2010/005744
Publication Date:
April 21, 2011
Filing Date:
September 22, 2010
Export Citation:
Assignee:
PANASONIC CORP (JP)
HARIGAI TAKAKIYO
ADACHI HIDEAKI
FUJII EIJI
HARIGAI TAKAKIYO
ADACHI HIDEAKI
FUJII EIJI
International Classes:
H01L41/187; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; C04B35/462; C23C14/08; G01C19/56; H01L41/08; H01L41/09; H01L41/113; H01L41/18; H01L41/22; H01L41/319; H01L41/39
Foreign References:
| JPH11180769A | 1999-07-06 | |||
| JP2001294482A | 2001-10-23 | |||
| JP2009010367A | 2009-01-15 |
Other References:
LANG WU: "Synthesis and Properties of [Bi0.5 (Na1-xAgx) 0.5]1-yBayTiO3 Piezoelectric Ceramics", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 44, no. 12, 15 December 2005 (2005-12-15), pages 8515 - 8518
Attorney, Agent or Firm:
KAMADA, KOICHI (JP)
Koichi Kamata (JP)
Koichi Kamata (JP)
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