Title:
PIEZOELECTRIC THIN FILM AND MANUFACTURING METHOD THEREFOR, INKJET HEAD, METHOD FOR FORMING IMAGES USING AN INKJET HEAD, ANGULAR VELOCITY SENSOR, METHOD FOR MEASURING ANGULAR VELOCITY USING AN ANGULAR VELOCITY SENSOR, PIEZOELECTRIC ELEMENT, AND METHOD FOR GENERATING ELECTRICITY USING PIEZOELECTRIC ELEMENTS
Document Type and Number:
WIPO Patent Application WO/2010/122707
Kind Code:
A1
Abstract:
Provided is a piezoelectric thin film that contains a lead-free ferroelectric material and has high piezoelectric performance comparable to lead zirconate titanate (PZT). Also provided is a manufacturing method for said piezoelectric thin film. The piezoelectric thin film is provided with a (001)-oriented LaNiO3 film, a (001)-oriented NaNbO3 film, and a (001)-oriented (Bi, Na, Ba)TiO3 film, layered in that order.
Inventors:
HARIGAI TAKAKIYO
ADACHI HIDEAKI
FUJII EIJI
ADACHI HIDEAKI
FUJII EIJI
Application Number:
PCT/JP2010/001472
Publication Date:
October 28, 2010
Filing Date:
March 03, 2010
Export Citation:
Assignee:
PANASONIC CORP (JP)
HARIGAI TAKAKIYO
ADACHI HIDEAKI
FUJII EIJI
HARIGAI TAKAKIYO
ADACHI HIDEAKI
FUJII EIJI
International Classes:
H01L41/09; B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; C23C14/06; G01C19/56; H01L41/08; H01L41/113; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H01L41/319; H01L41/39
Foreign References:
| JP2007266346A | 2007-10-11 | |||
| JP2007019302A | 2007-01-25 | |||
| JPH0460073A | 1992-02-26 | |||
| JPH10139552A | 1998-05-26 |
Attorney, Agent or Firm:
KAMADA, KOICHI (JP)
Koichi Kamata (JP)
Koichi Kamata (JP)
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