Title:
PIEZOELECTRIC TRANSDUCER, PIEZOELECTRIC TRANSDUCER MOUNTED BODY, AND METHOD FOR MANUFACTURING PIEZOELECTRIC TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2010/097898
Kind Code:
A1
Abstract:
Disclosed is a piezoelectric transducer comprising a package formed by joining a first substrate and a second substrate so that a cavity is formed between the substrates; an internal electrode part formed on the first substrate and contained in the cavity; a piezoelectric vibration piece sealed within the cavity and electrically connected with the internal electrode part in the cavity; an external electrode part formed on the outer surface of the first substrate; a through electrode part which is so arranged as to not overlap the external electrode part in the thickness direction of the first substrate and penetrates the first substrate in such a manner that one end thereof is electrically connected with the internal electrode part and the other end is in the outer surface of the first substrate; and a lead wiring part electrically connecting the through electrode part with the external electrode part.
Inventors:
SUGIYAMA TAKESHI (JP)
Application Number:
PCT/JP2009/053327
Publication Date:
September 02, 2010
Filing Date:
February 25, 2009
Export Citation:
Assignee:
SEIKO INSTR INC (JP)
SUGIYAMA TAKESHI (JP)
SUGIYAMA TAKESHI (JP)
International Classes:
H03H9/10; H03H3/02
Foreign References:
| JP2004214787A | 2004-07-29 | |||
| JPH09237802A | 1997-09-09 | |||
| JPH08125063A | 1996-05-17 |
Attorney, Agent or Firm:
MATSUSHITA, YOSHIHARU (JP)
Matsushita Yoshiharu (JP)
Matsushita Yoshiharu (JP)
Download PDF: