PIEZOELECTRIC TRANSDUCER

WIPO Patent Application WO/2020/121596

A1

End parts (121) of each of a plurality of beam parts (120) are supported by base parts (110), and each of the plurality of beam parts (120) extends in a direction away from the base parts (110) at positions further to the upper side than the base parts (110). Each of the plurality of beam parts (120) is formed from a plurality of layers. Each of the plurality of beam parts (120) comprises: a piezoelectric body layer (122); an upper electrode layer (123) which is positioned to the upper side of the piezoelectric body layer (122); and a lower electrode layer (124) which is positioned so as to face at least a portion of the upper electrode layer (123) with the piezoelectric body layer (122) sandwiched therebetween. Anchoring parts (130) are positioned above the beam parts (120) so as to sandwich the end parts (121) of each of the plurality of beam parts (120) between said anchoring parts (130) and the base parts (110). While being positioned so as to vertically overlap at least partially with the base parts (110), the anchoring parts (130) extend so as to protrude further than the base parts (110) in the extension direction of the beam parts (120).

UMEZAWA SEIJI (JP)
IKEUCHI SHINSUKE (JP)
KUROKAWA FUMIYA (JP)
ADACHI NOBUYOSHI (JP)
MOCHIDA YOICHI (JP)

PCT/JP2019/032100

June 18, 2020

August 16, 2019

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MURATA MANUFACTURING CO (JP)

H04R17/00; B81B3/00; H01L41/053; H01L41/113

JP2018098546A	2018-06-21
JPS601097U	1985-01-07
JPH02126798A	1990-05-15

FUKAMI PATENT OFFICE, P.C. (JP)

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