Title:
PIEZOELECTRIC VIBRATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/137830
Kind Code:
A1
Abstract:
This piezoelectric vibration device is provided with an inner space in which a vibrating section (11) of a crystal diaphragm (10) that includes a first excitation electrode (111) and a second excitation electrode (112) is hermetically sealed by joining a first sealing member (20) to the crystal diaphragm (10) and by joining a second sealing member (30) to the crystal diaphragm (10). A through-hole (33) is formed in the second sealing member (30), and formed on the inner wall face of the through-hole (33) is a through-electrode (331) for electrically connecting an electrode (34) formed on a first main face (301) to an external electrode terminal (32) formed on a second main face (302). The through-electrode (331) is provided with a structure which is corrosion-resistant to solder (120), and the through-electrode (331) electrically connects the electrode (34) of the first main face (301) to the external electrode terminal (32) of the second main face (302) by means of an electrically conductive metal other than silver (Au).
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Inventors:
ISHINO SATORU (JP)
YOSHIOKA HIROKI (JP)
FUJIWARA HIROKI (JP)
YOSHIOKA HIROKI (JP)
FUJIWARA HIROKI (JP)
Application Number:
PCT/JP2019/049915
Publication Date:
July 02, 2020
Filing Date:
December 19, 2019
Export Citation:
Assignee:
DAISHINKU CORP (JP)
International Classes:
H01L23/04; H01L25/065; H01L25/07; H01L25/18; H03B5/32; H03H9/02
Domestic Patent References:
WO2018051800A1 | 2018-03-22 |
Foreign References:
JP2018142888A | 2018-09-13 | |||
JP2015106638A | 2015-06-08 | |||
JP2013051510A | 2013-03-14 | |||
JP2004214787A | 2004-07-29 | |||
JP2014143600A | 2014-08-07 | |||
JPH1126628A | 1999-01-29 |
Attorney, Agent or Firm:
ARC PATENT ATTORNEYS' OFFICE (JP)
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