Title:
PIEZOELECTRIC VIBRATION ELEMENT, PIEZOELECTRIC DEVICE USING PIEZOELECTRIC VIBRATION ELEMENT, METHOD FOR MANUFACTURING PIEZOELECTIC VIBRATION ELEMENT, AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE USING PIEZOELECTRIC VIBRATION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2015/060032
Kind Code:
A1
Abstract:
[Problem] To provide a highly reliable piezoelectric vibration element for which a reduction in the electrode dimensions can be minimized when the frequency is adjusted, and which has excellent weather resistance and heat resistance; and to provide a piezoelectric device that uses this piezoelectric vibration element, a method for manufacturing this piezoelectric vibration element, and a method for manufacturing a piezoelectric device that uses this piezoelectric vibration element. [Solution] Vibration electrodes (23a, 23b) are formed on the front and back principal surfaces of a liquid crystal vibration plate of a liquid crystal vibration element (2). The vibration electrodes are configured from a ternary alloy having silver as the primary component and including a first additive which is a metallic element that has a lower sputtering rate than silver and is not easily corroded by etching solution, and a second additive which is an element that forms a solid solution with silver. The outer peripheral part of the vibration electrodes forms a first-additive-rich region (9) that is rich in the first additive.
Inventors:
KOHDA NAOKI (JP)
Application Number:
PCT/JP2014/073922
Publication Date:
April 30, 2015
Filing Date:
September 10, 2014
Export Citation:
Assignee:
DAISHINKU CORP (JP)
International Classes:
H03H9/19; H03H3/02
Foreign References:
| JP2001044785A | 2001-02-16 | |||
| JP2001192752A | 2001-07-17 | |||
| JP2002141760A | 2002-05-17 |
Attorney, Agent or Firm:
ARC PATENT ATTORNEYS' OFFICE (JP)
Patent business corporation ARC PATENT ATTORNEYS' OFFICE (JP)
Patent business corporation ARC PATENT ATTORNEYS' OFFICE (JP)
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