PIEZOELECTRIC VIBRATION SENSOR

Title:

PIEZOELECTRIC VIBRATION SENSOR

Document Type and Number:

WIPO Patent Application WO/2013/027736

Kind Code:

A1

Abstract:

A piezoelectric vibration sensor (1) is configured of a piezoelectric vibrator (2), a base (3), a potential difference measuring means (4), and a calculating means (5). The piezoelectric vibrator (2) is configured of a piezoelectric ceramic board (6), and a first electrode (7), a second electrode (8), a third electrode, and a fourth electrode, said electrodes being disposed on the front and rear surfaces of the piezoelectric ceramic board (6). The first electrode (7) and the second electrode (8) are disposed parallel to each other on the front surface of the piezoelectric ceramic board (6), and the third electrode and the fourth electrode are disposed on the rear surface of the piezoelectric ceramic board (6), said third electrode and the fourth electrode being disposed exactly at the rear of the first electrode (7) and the second electrode (8).

Inventors:

TAKAHASHI MASATAKE (JP)
SHINODA SHIGEKI (JP)
TAKATA SOICHIRO (JP)
KASAI SHIGERU (JP)
SASAKI YASUHIRO (JP)

Application Number:

PCT/JP2012/071099

Publication Date:

February 28, 2013

Filing Date:

August 21, 2012

Export Citation:

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Assignee:

NEC CORP (JP)
TAKAHASHI MASATAKE (JP)
SHINODA SHIGEKI (JP)
TAKATA SOICHIRO (JP)
KASAI SHIGERU (JP)
SASAKI YASUHIRO (JP)

International Classes:

G01L1/16; G01H11/08; G01P15/09; H01L41/08; H01L41/187

Foreign References:

JPH11230980A	1999-08-27
JPH0954112A	1997-02-25
JPH05188081A	1993-07-27
JPH0526744A	1993-02-02
JPS6246266A	1987-02-28

Attorney, Agent or Firm:

KIMURA MITSURU (JP)
Mitsuru Kimura (JP)

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Claims:

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