Title:
PIEZOELECTRIC VIBRATOR AND FREQUENCY ADJUSTMENT METHOD FOR PIEZOELECTRIC VIBRATOR
Document Type and Number:
WIPO Patent Application WO/2015/098372
Kind Code:
A1
Abstract:
Provided is a frequency adjustment method wherein a residue does not tend to occur, frequency can be adjusted with high accuracy, and a strength decrease is small.
This frequency adjustment method for a piezoelectric vibrator (1) is provided with: a step for preparing the piezoelectric vibrator (1) provided with a base part (2), a vibrating arm part (3) that comprises a connecting part (3a) continuous with the base part (2), and a plurality of vibrating arm bodies (3b) extending from the connecting part (3a), and is formed from a single crystal, a lower electrode (5) that is formed on the vibrating arm part (3), a piezoelectric thin film (6) that is formed on the lower electrode (5), and an upper electrode (7) that is formed on the piezoelectric thin film (6); and a step for forming an altered part (8) by irradiating the connecting part (3a) with laser light (B).
Inventors:
UNAMI TOSHIHIKO (JP)
KAMEDA EITARO (JP)
KAMEDA EITARO (JP)
Application Number:
PCT/JP2014/080641
Publication Date:
July 02, 2015
Filing Date:
November 19, 2014
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/24; H03H3/04
Foreign References:
| JP2007324513A | 2007-12-13 | |||
| JP2012060264A | 2012-03-22 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
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