Title:
PIEZOELECTRIC VIBRATOR AND OSCILLATOR INCLUDING SAME
Document Type and Number:
WIPO Patent Application WO/2021/005833
Kind Code:
A1
Abstract:
This piezoelectric vibrator (100) comprises a base member (30), a lid member (40), and a laminated structure (101) provided between the base member (30) and the lid member (40), wherein the laminated structure (101) includes: a piezoelectric vibration element (10) that has a piezoelectric layer (11) having a pair of opposing main surfaces and a pair of excitation electrodes (14a, 14b) respectively provided on the pair of main surfaces of the piezoelectric layer (11) to face each other with the piezoelectric layer (11) interposed therebetween; a semiconductor layer (21) that is laminated on any main surface side of the piezoelectric layer (11) of the piezoelectric vibration element (10); and a pair of measurement electrodes (24c, 24d) that are provided on the semiconductor layer (21), and the pair of measurement electrodes (24c, 24d) are configured to measure a signal on the basis of the temperature of the piezoelectric vibration element (10) via the semiconductor layer (21).
Inventors:
KAMEDA EITARO (JP)
TAKEYAMA KEISUKE (JP)
NISHIMURA TOSHIO (JP)
NAKATANI HIROSHI (JP)
TAKEYAMA KEISUKE (JP)
NISHIMURA TOSHIO (JP)
NAKATANI HIROSHI (JP)
Application Number:
PCT/JP2020/010771
Publication Date:
January 14, 2021
Filing Date:
March 12, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03B5/32; H03H9/02
Foreign References:
JP2016152607A | 2016-08-22 | |||
JP2016116054A | 2016-06-23 | |||
JP2019068304A | 2019-04-25 | |||
JP2005286658A | 2005-10-13 | |||
JP2007235388A | 2007-09-13 | |||
JP2015170950A | 2015-09-28 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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