PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC OSCILLATOR, AND METHOD FOR MAKING PIEZOELECTRIC VIBRATOR

WIPO Patent Application WO/2022/123816

A1

Provided are a piezoelectric vibrator, a piezoelectric oscillator and a method for making a piezoelectric vibrator wherein sticking of a vibration part can be suppressed.　A crystal vibrator 1 comprises: a crystal vibration element 10 including a crystal piece 11, a first excitation electrode 14a and a second excitation electrode 14b that are located on a vibration part 11A of the crystal piece 11, a first extraction electrode 15a provided on a first main surface 12a of the crystal piece 11 and electrically connected to the first excitation electrode 14a, and a second extraction electrode 15b provided on a second main surface 12b of the crystal piece 11 and electrically connected to the second excitation electrode 14b; and an insulation layer 40 including a cavity part 41 forming a space between the insulation layer 40 and the second excitation electrode 14b. The thickness of the first extraction electrode 15a is greater than the thickness of the second extraction electrode 15b. An end of the first extraction electrode 15a is located, in a plan view, on one side, relative to an end of the cavity part 41, that includes the vibration part 11A.

NISHIMURA TOSHIO (JP)
OOI YUUKI (JP)
YODA TADASHI (JP)
OKAWA TADAYUKI (JP)

PCT/JP2021/025550

June 16, 2022

July 07, 2021

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MURATA MANUFACTURING CO (JP)

H03H9/10; H03H3/02; H03H9/19

JP2004120494A	2004-04-15
JP2014239392A	2014-12-18
JP2019193168A	2019-10-31
JP2020053802A	2020-04-02
JP2012175405A	2012-09-10
JP2014107711A	2014-06-09
JP2014078905A	2014-05-01

INABA, Yoshiyuki et al. (JP)

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