Title:
PIEZOELECTRIC VIBRATOR AND PIEZOELECTRIC VIBRATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/108125
Kind Code:
A1
Abstract:
In order to enable the efficient adjustment of the resonance frequency of a piezoelectric vibrator, a piezoelectric vibrator is provided with: a first electrode and a second electrode; a piezoelectric film which is formed between the first electrode and the second electrode and has a first surface facing the first electrode; and a first adjustment film and a second adjustment film which are formed to face the first surface of the piezoelectric film with the first electrode therebetween. The first adjustment film overlaps with the piezoelectric film in at least a first region of the first surface, the second adjustment film overlaps with the piezoelectric film in at least a second region different from the first region of the first surface, approximately the entire area of the first surface is covered with the first and second regions, the second region is a region that undergoes a larger displacement than the first region when the piezoelectric vibrator vibrates, and the second adjustment film is produced from a material the speed of mass reduction by etching of which is higher than that of the first adjustment film.
Inventors:
TAKEYAMA KEISUKE (JP)
NAKAMURA DAISUKE (JP)
KAMEDA EITARO (JP)
KAIDA HIROAKI (JP)
NAKAMURA DAISUKE (JP)
KAMEDA EITARO (JP)
KAIDA HIROAKI (JP)
Application Number:
PCT/JP2015/050991
Publication Date:
July 23, 2015
Filing Date:
January 15, 2015
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/17; H03H9/02
Domestic Patent References:
| WO2007088696A1 | 2007-08-09 |
Foreign References:
| JP2005151353A | 2005-06-09 | |||
| JP2004112757A | 2004-04-08 | |||
| JP2011155363A | 2011-08-11 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Yoshiyuki Inaba (JP)
Yoshiyuki Inaba (JP)
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