Title:
PIEZOELECTRIC VIBRATOR
Document Type and Number:
WIPO Patent Application WO/2021/220542
Kind Code:
A1
Abstract:
A piezoelectric vibrator (1) comprises a piezoelectric vibration element (10), a base member (30), an electrically conductive adhesive bonding member (50), and a lid member (40) of electrically conductive material. The lid member (40) has an opposing surface (43B) opposing the base member (30). The base member (30) has a feeding electrode and a grounding electrode. The grounding electrode is electrically connected to the lid member (40) with the bonding member (50) therebetween. The elastic modulus Eb of the bonding member at 30℃ and the thickness T of the bonding member between the base member (30) and the opposing surface (43B) satisfy the relations 0.5 GPa ≤ Eb ≤ 4.0 GPa and 10 μm ≤ T ≤ 50 μm.
Inventors:
OJIMA SHIGEO (JP)
Application Number:
PCT/JP2020/044480
Publication Date:
November 04, 2021
Filing Date:
November 30, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L23/02; H01L23/06; H03H9/02
Foreign References:
| JP2015220749A | 2015-12-07 | |||
| JP2018170793A | 2018-11-01 | |||
| JP2009105804A | 2009-05-14 | |||
| JP2017135573A | 2017-08-03 | |||
| JP2005183292A | 2005-07-07 | |||
| JP2020043434A | 2020-03-19 | |||
| JP2002271163A | 2002-09-20 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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