Title:
PIEZOELECTRICALLY DRIVEN VALVE AND PIEZOELECTRICALLY DRIVEN FLOW VOLUME CONTROL APPARATUS
Document Type and Number:
WIPO Patent Application WO/2011/067891
Kind Code:
A1
Abstract:
Disclosed is a piezoelectrically driven valve, which can control even a fluid at a temperature higher than a temperature in the use range of a piezoelectric actuator. Also disclosed is a piezoelectrically driven fluid control apparatus.
The piezoelectrically driven valve is provided with: a valve body (2) which opens and closes a fluid channel (1b); a piezoelectric actuator (10) which drives the valve body (2) to open and close using expansion and contraction of a piezoelectric element; and a heat dissipating spacer (40), which lifts and supports the piezoelectric actuator (10) such that the piezoelectric actuator is at a distance from the fluid channel (1b), and which dissipates heat transferred to the piezoelectric actuator (10) from the fluid flowing in the fluid channel (1b). Furthermore, the piezoelectrically driven valve preferably has a supporting cylindrical body (23A), which houses and supports both the piezoelectric actuator (10) and the heat dissipating spacer (40). In the supporting cylindrical body (23A), at least a portion that houses the heat dissipating spacer (40) is formed of a material having the same thermal expansion coefficient as that of the heat dissipating spacer (40).
Inventors:
HIDAKA ATSUSHI (JP)
HIRATA KAORU (JP)
NAGASE MASAAKI (JP)
IKEDA NOBUKAZU (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
HIRATA KAORU (JP)
NAGASE MASAAKI (JP)
IKEDA NOBUKAZU (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
Application Number:
PCT/JP2010/006483
Publication Date:
June 09, 2011
Filing Date:
November 04, 2010
Export Citation:
Assignee:
FUJIKIN KK (JP)
HIDAKA ATSUSHI (JP)
HIRATA KAORU (JP)
NAGASE MASAAKI (JP)
IKEDA NOBUKAZU (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
HIDAKA ATSUSHI (JP)
HIRATA KAORU (JP)
NAGASE MASAAKI (JP)
IKEDA NOBUKAZU (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
International Classes:
F16K49/00; F16K7/14; F16K31/02; F16K37/00; G05D7/06
Domestic Patent References:
| WO2008129783A1 | 2008-10-30 | |||
| WO2007083439A1 | 2007-07-26 |
Foreign References:
| JP2004162733A | 2004-06-10 | |||
| JP4119109B2 | 2008-07-16 | |||
| JPS54147525A | 1979-11-17 | |||
| JP2000205428A | 2000-07-25 |
Attorney, Agent or Firm:
SUGIMOTO, Takeo et al. (JP)
Takeo Sugimoto (JP)
Takeo Sugimoto (JP)
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