Title:
PIEZORESISTIVE ACCELEROMETER AND METHOD FOR PACKAGING PIEZORESISTIVE ACCELEROMETER
Document Type and Number:
WIPO Patent Application WO/2017/159979
Kind Code:
A1
Abstract:
A piezoresistive accelerometer according to an embodiment comprises: a support; a mass connected to the support so as to be movable by external force; a plurality of piezoresistors disposed between the support and the mass so as to be deformed by a movement of the mass; and a connecting part disposed between the support and the mass so as to allow the mass to rotate with respect to the support, wherein the plurality of piezoresistors are tensioned or compressed by a rotation of the mass about the connecting part, which can cause resistance changes in the plurality of piezoresistors.
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Inventors:
KO JONG SOO (KR)
JANG CHANG UK (KR)
JANG CHANG UK (KR)
Application Number:
PCT/KR2017/000930
Publication Date:
September 21, 2017
Filing Date:
January 26, 2017
Export Citation:
Assignee:
PUSAN NAT UNIV INDUSTRY-UNIV COOP FOUND (KR)
International Classes:
G01P15/13; G01L1/18; G01P1/02
Foreign References:
| US20150059476A1 | 2015-03-05 | |||
| KR20120105161A | 2012-09-25 | |||
| KR20140134064A | 2014-11-21 | |||
| KR101099586B1 | 2011-12-28 |
Other References:
XU, YU ET AL.: "A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency", SENSORS, vol. 16, no. 2, 6 February 2016 (2016-02-06), pages 210 - 214, XP055422262
Attorney, Agent or Firm:
MUHANN PATENT & LAW FIRM (KR)
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