Title:
PIEZORESISTIVE ELEMENT, MECHANICAL QUANTITY DETECTION SENSOR AND MICROPHONE
Document Type and Number:
WIPO Patent Application WO/2018/131234
Kind Code:
A1
Abstract:
Provided is a piezoresistive element exhibiting high detection sensitivity and a high gauge factor. A piezoresistive element equipped with a field effect transistor 20A and a piezoelectric capacitor 20B, wherein: the piezoelectric capacitor 20B is connected in series to the gate electrode 9 of the field effect transistor 20A; the electric charge produced when a strain is imparted to the piezoelectric capacitor 20B causes the voltage (gate voltage) of the gate electrode 9 of the field effect transistor 20A to fluctuate, and the resistance value between a source electrode 11 and a drain electrode 10 to change; the size of the strain is detected from the size of the change in the resistance value; and the resistance value has a region which changes exponentially relative to the size of the strain, and the exponentially changing region is used in order to detect the size of the strain.
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Inventors:
NOMURA MASANOBU (JP)
YOSHII YOSHIHARU (JP)
YOSHII YOSHIHARU (JP)
Application Number:
PCT/JP2017/036747
Publication Date:
July 19, 2018
Filing Date:
October 11, 2017
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01L9/00; G01L9/08; H01L29/84; H01L41/113; H04R17/02
Domestic Patent References:
| WO1999060413A1 | 1999-11-25 | |||
| WO2016207751A1 | 2016-12-29 |
Foreign References:
| JP2011522456A | 2011-07-28 | |||
| JP2015179074A | 2015-10-08 |
Attorney, Agent or Firm:
KAWAMOTO, Takashi (JP)
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