Title:
PIPE CLOGGING PREVENTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/164292
Kind Code:
A1
Abstract:
The present invention relates to a pipe clogging prevention device capable of preventing clogging of pipes by powder and impurities generated in an exhaust line, etc. during a semiconductor manufacturing process, wherein gas inlet members (100 and 100') for supplying gas, such as nitrogen gas, from the outside, and gas injection members (200 and 200') for injecting gas into the inside of a pipe, are connected to the pipe in series, and injection nozzles (260 and 260'), which are formed in the gas injection members (200 and 200') to be inclined forward so as to accelerate the flow in the pipe, are installed in an exhaust line of the semiconductor manufacturing process, and thus can effectively prevent powder generated by waste gas from sticking to the inside of the pipe.
Inventors:
CHOI HEUNG YEOP (KR)
Application Number:
PCT/KR2022/001676
Publication Date:
August 04, 2022
Filing Date:
January 30, 2022
Export Citation:
Assignee:
CHOI HEUNG YEOP (KR)
International Classes:
H01L21/67; C23C16/44
Foreign References:
| KR20110016011A | 2011-02-17 | |||
| KR20190027977A | 2019-03-18 | |||
| KR20160011345A | 2016-02-01 | |||
| KR200371068Y1 | 2004-12-29 | |||
| KR20100082634A | 2010-07-19 |
Attorney, Agent or Firm:
TREX INTERNATIONAL PATENT & LAW OFFICE (KR)
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