Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PIPE-TYPE PECVD DUAL FURNACE DOOR MECHANISM
Document Type and Number:
WIPO Patent Application WO/2019/136770
Kind Code:
A1
Abstract:
A pipe-type PECVD dual furnace door mechanism, related to the technical field of solar cell equipment, comprising a boat pusher furnace door mechanism (10), a cylinder furnace door mechanism (20), and a vacuum reaction chamber (30). The vacuum reaction chamber (30) is provided with a furnace opening (301). A graphite boat is provided within the vacuum reaction chamber (30). The boat pusher furnace door mechanism (10) comprises a push rod (101) and a first furnace door (102). The first furnace door (102) is fixedly mounted at the middle part of the push rod (101). The top extremity of the push rod (101) is inserted from the furnace opening (301) into the vacuum reaction chamber (31) and is fixedly connected to the graphite boat. The cylinder furnace door mechanism (20) is arranged at a side of the furnace door (301). The cylinder furnace door mechanism (20) comprises a second furnace door (201) and a furnace door driving apparatus (202). The beneficial effects are: heat loss and impact on the temperature of an operating area are reduced, thus achieving the goal of reducing energy consumption and increasing production efficiency.

Inventors:
WANG, Junchao (2nd Fl, Bldg. A Han's Innovation Mansion, #9018 Beihuan Rd.,Hi-tech Industrial Park,Nanshan Dist, Shenzhen Guangdong 0, 518000, CN)
LIU, Bingji (2nd Fl, Bldg. A Han's Innovation Mansion, #9018 Beihuan Rd.,Hi-tech Industrial Park,Nanshan Dist, Shenzhen Guangdong 0, 518000, CN)
LI, Xuewen (2nd Fl, Bldg. A Han's Innovation Mansion, #9018 Beihuan Rd.,Hi-tech Industrial Park,Nanshan Dist, Shenzhen Guangdong 0, 518000, CN)
LI, Junyang (2nd Fl, Bldg. A Han's Innovation Mansion, #9018 Beihuan Rd.,Hi-tech Industrial Park,Nanshan Dist, Shenzhen Guangdong 0, 518000, CN)
Application Number:
CN2018/073035
Publication Date:
July 18, 2019
Filing Date:
January 17, 2018
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHENZHEN FULLSHARE EQUIPMENT CO.,LTD. (2nd Fl, Bldg. A Han's Innovation Mansion, #9018 Beihuan Rd.,Hi-tech Industrial Park,Nanshan Dist, Shenzhen Guangdong 0, 518000, CN)
International Classes:
C23C16/513; F27D3/00
Attorney, Agent or Firm:
SHENZHEN SHENKEXIN INTELLECTUAL PROPERTY LLP.: (Room2420, BlockASouth International Plaza,Yitian Road, Fubao Street,Futian Distric, Shenzhen Guangdong 0, 518000, CN)
Download PDF: