Title:
PLACEMENT PANEL AND PLACEMENT STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2022/209292
Kind Code:
A1
Abstract:
This placement panel comprises a main body part in which a flow passage that circulates a medium for performing heat exchange is formed and a workpiece is placed. The main body part has a heater which is formed by using a metallic material and is provided on the outer edge side of the main body part, wherein in a state in which the heater is operated and the medium is circulated through the flow passage, the temperature difference between the outer edge side and the inner side on a workpiece placement surface of the main body part is at least 20℃.
Inventors:
KIDA NAOYA (JP)
FUTAKUTIYA JUN (JP)
FUJINO DAISUKE (JP)
AIKAWA NAOYA (JP)
WADA KEIKO (JP)
NAKAJIMA AYA (JP)
FUTAKUTIYA JUN (JP)
FUJINO DAISUKE (JP)
AIKAWA NAOYA (JP)
WADA KEIKO (JP)
NAKAJIMA AYA (JP)
Application Number:
PCT/JP2022/004526
Publication Date:
October 06, 2022
Filing Date:
February 04, 2022
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
International Classes:
H05B3/10; H01L21/683; H05B3/72
Domestic Patent References:
| WO2018030433A1 | 2018-02-15 |
Foreign References:
| JP2009117486A | 2009-05-28 | |||
| JP2007258607A | 2007-10-04 | |||
| US20190204029A1 | 2019-07-04 | |||
| JP2017195060A | 2017-10-26 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Download PDF:
Previous Patent: CONTACT TERMINAL AND CONTACT DEVICE
Next Patent: RAIL AND METHOD FOR MANUFACTURING SAME
Next Patent: RAIL AND METHOD FOR MANUFACTURING SAME