Title:
PLACING TABLE STRUCTURE AND PROCESSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/011488
Kind Code:
A1
Abstract:
Provided is a placing table structure, which is provided in an air-releasable processing container, and which has placed thereon a body to be processed. The placing table structure is provided with: a placing table (58), which has placed thereon the body to be processed, and has a heating unit that heats the body to be processed; a columnar structure (60), which stands from the bottom portion of the processing container, and has an upper end portion thereof connected to the lower surface of the placing table; a fixing unit (62), which fixes the lower end portion of the columnar structure to the bottom portion of the processing container; and a heat shield structure having a plurality of heat shield plates (64), which are dispersedly provided in the height direction of the columnar structure on the outer side of the columnar structure.
Inventors:
NAGAOKA, Hideki (650 Mitsuzawa, Hosaka-Cho, Nirasaki-Sh, Yamanashi 92, 〒4070192, JP)
Application Number:
JP2011/066420
Publication Date:
January 26, 2012
Filing Date:
July 20, 2011
Export Citation:
Assignee:
Tokyo Electron Limited (3-1 Akasaka 5-Chome, Minato-Ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
International Classes:
H01L21/683; C23C16/458; H01L21/31
Attorney, Agent or Firm:
ITOH, Tadahiko (32nd Floor, Yebisu Garden Place Tower 20-3, Ebisu 4-Chome, Shibuya-K, Tokyo 32, 〒1506032, JP)
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Claims: