Title:
PLACING TABLE STRUCTURE AND TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/009118
Kind Code:
A1
Abstract:
The placing table structure according to one embodiment of the present invention has: a refrigeration heat transfer body that is fixedly disposed; a rotatable outer pipe that is disposed around the refrigeration heat transfer body; and a placing table, which is connected to the outer pipe, and is disposed on the upper surface of the refrigeration heat transfer body by having a gap therebetween.
Inventors:
ORIMOTO SHINJI (JP)
NAKAGAWASAI MANABU (JP)
MAEDA KOUJI (JP)
MIKI HIROSHI (JP)
SUZUKI NAOYUKI (JP)
NAKAGAWASAI MANABU (JP)
MAEDA KOUJI (JP)
MIKI HIROSHI (JP)
SUZUKI NAOYUKI (JP)
Application Number:
PCT/JP2018/023967
Publication Date:
January 10, 2019
Filing Date:
June 25, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/683; C23C14/50; C23C16/46; H02N13/00
Domestic Patent References:
WO2017221631A1 | 2017-12-28 |
Foreign References:
JPH11131230A | 1999-05-18 | |||
JPH04267355A | 1992-09-22 | |||
JPH05299360A | 1993-11-12 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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