Title:
PLANAR HEATING UNIT FOR A SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/020924
Kind Code:
A1
Abstract:
The invention relates to a planar heating unit for a substrate treatment device with an increased power density and an improved uniformity of heat radiation. According to the invention, in a planar heating unit for a substrate treatment device that comprises a jacketed tube heater with straight tube sections and bent tube sections, the straight tube sections lying parallel to one another on a primary plane and the straight tube sections being interconnected by bent tube sections, at least one part of the bent tube sections is inclined in relation to the primary plane.
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Inventors:
HENTSCHEL, Michael (Döbraer Strasse 6, Dresden, 01189, DE)
MEYER, Thomas (Noethnitzer Strasse 22, Dresden, 01187, DE)
VON DER WAYDBRINK, Hubertus (Zaschendorfer Strasse 15, Dresden, 01326, DE)
KENNE, Marco (Prießnitzaue 2, Dresden, 01099, DE)
STANGE, Daniel (Waldteichstrasse 5, Dresden, 01109, DE)
HECHT, Hans-Christian (Nordstrasse 13a, Weinboehla, 01689, DE)
MEYER, Thomas (Noethnitzer Strasse 22, Dresden, 01187, DE)
VON DER WAYDBRINK, Hubertus (Zaschendorfer Strasse 15, Dresden, 01326, DE)
KENNE, Marco (Prießnitzaue 2, Dresden, 01099, DE)
STANGE, Daniel (Waldteichstrasse 5, Dresden, 01109, DE)
HECHT, Hans-Christian (Nordstrasse 13a, Weinboehla, 01689, DE)
Application Number:
EP2010/062264
Publication Date:
February 24, 2011
Filing Date:
August 23, 2010
Export Citation:
Assignee:
VON ARDENNE ANLAGENTECHNIK GMBH (Plattleite 19/29, Dresden, 01324, DE)
HENTSCHEL, Michael (Döbraer Strasse 6, Dresden, 01189, DE)
MEYER, Thomas (Noethnitzer Strasse 22, Dresden, 01187, DE)
VON DER WAYDBRINK, Hubertus (Zaschendorfer Strasse 15, Dresden, 01326, DE)
KENNE, Marco (Prießnitzaue 2, Dresden, 01099, DE)
STANGE, Daniel (Waldteichstrasse 5, Dresden, 01109, DE)
HECHT, Hans-Christian (Nordstrasse 13a, Weinboehla, 01689, DE)
HENTSCHEL, Michael (Döbraer Strasse 6, Dresden, 01189, DE)
MEYER, Thomas (Noethnitzer Strasse 22, Dresden, 01187, DE)
VON DER WAYDBRINK, Hubertus (Zaschendorfer Strasse 15, Dresden, 01326, DE)
KENNE, Marco (Prießnitzaue 2, Dresden, 01099, DE)
STANGE, Daniel (Waldteichstrasse 5, Dresden, 01109, DE)
HECHT, Hans-Christian (Nordstrasse 13a, Weinboehla, 01689, DE)
International Classes:
F27D11/02; C23C16/48; F27D99/00; H05B3/48
Attorney, Agent or Firm:
LIPPERT, STACHOW & PARTNER (Krenkelstraße 3, Dresden, 01309, DE)
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Claims:
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