Title:
PLANARIZATION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/212546
Kind Code:
A1
Abstract:
Provided is a planarization method capable of making the local flatness of a product to be machined more even. A product to be machined is provided with a cavity filled with an oxide, and said product comprises a first electrode layer, a piezoelectric layer and a second electrode layer, which are arranged on the cavity in a stacked manner, wherein the first electrode layer comprises a first slope portion located at the periphery of the first electrode layer; the piezoelectric layer forms a second slope portion on a surface thereof; and the second electrode layer comprises a third slope portion located at the periphery of the second electrode layer. The method comprises: depositing a first passivation layer on a second electrode layer; etching the first passivation layer to form a gasket on the outer periphery of a third slope portion, and the gasket forming a fourth slope portion on a surface thereof; and depositing a second passivation layer on the second electrode layer, wherein the second passivation layer has a first flat portion, a fifth slope portion arranged on the outer periphery of the first flat portion, and a second flat portion that extends from the fifth slope portion, a projection of the first flat portion in a vertical direction covering the cavity, and an orthographic projection of the fifth slope portion in the vertical direction falling outside the cavity.
Inventors:
LOO LI ENG (SG)
LAI KAH KEEN (SG)
WU YILEI (CN)
LAI KAH KEEN (SG)
WU YILEI (CN)
Application Number:
PCT/CN2020/088777
Publication Date:
October 28, 2021
Filing Date:
May 06, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
International Classes:
H03H3/02; H03H9/15
Domestic Patent References:
| WO2007119643A1 | 2007-10-25 |
Foreign References:
| US20070247260A1 | 2007-10-25 | |||
| CN110912528A | 2020-03-24 | |||
| CN109474255A | 2019-03-15 | |||
| CN111010137A | 2020-04-14 | |||
| JP2013016738A | 2013-01-24 |
Attorney, Agent or Firm:
GUANGZHOU YUEXIU JILY PATENT & TRADEMARK LAW OFFICE (CN)
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