PLANARIZING DEVICE - TOHO ENG CO LTD

Title:

PLANARIZING DEVICE

Document Type and Number:

WIPO Patent Application WO/2017/155081

Kind Code:

A1

Abstract:

[Problem] To enable precise planarizing with a compact device without causing damage to a workpiece while also effectively suppressing the occurrence of vibrations during device activation. [Solution] This planarizing device is provided with a pair of planarizing units SP1, SP2 each equipped with: a holder 62 that holds the reverse side of a workpiece W; a drive motor 71 that, within the surface of the workpiece W, rotates the holder 62 about an axis intersecting said surface; a support plate 4 that holds a pad 5 and positions the surface of the pad 5 opposite the surface of the workpiece W; a linear guide 3 that enables reciprocating movement of the support plate 4 in a parallel direction to the surface of the pad 5 only in an amount that enables at least planarization by catalytic reaction; and a drive cylinder 72 that advances the holder 62 or the support plate 4 in a direction intersecting the surface of the workpiece W and the pad 5 so as to bring the surface of the workpiece W and the surface of the pad 5 close together or in mutual contact. The planarizing device is also provided with a main drive unit PD that reciprocates the support plates 4 of the planarizing units SP1, SP2 in mutually opposite phases upon the same straight line.

Inventors:

SUZUKI TATSUTOSHI (JP)
SUZUKI EISUKE (JP)
SUZUKI DAISUKE (JP)

Application Number:

PCT/JP2017/009672

Publication Date:

September 14, 2017

Filing Date:

March 10, 2017

Export Citation:

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Assignee:

TOHO ENG CO LTD (JP)

International Classes:

B24B1/00; H01L21/306; B24B37/07; B24B37/34

Domestic Patent References:

WO2015159973A1

2015-10-22

Foreign References:

JP2002283226A	2002-10-03
JP2009117782A	2009-05-28
JP2008049430A	2008-03-06
JP2015514599A	2015-05-21
JP2013255961A	2013-12-26
JP2004223636A	2004-08-12

Other References: