Title:
PLANE GRATING CALIBRATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2020/228720
Kind Code:
A1
Abstract:
A plane grating (25) calibration system, said system comprising an optical subsystem, a frame (24), first vibration isolators (22), a vacuum chuck (19), a workpiece table (18), second vibration isolators (21), a substrate (20) and a controller (23); the optical subsystem is mounted on the frame (24), and the frame (24) uses the first vibration isolators (22) for vibration isolation; the vacuum chuck (19) is rotatably mounted on the workpiece table (18), the workpiece table (18) is located on the substrate (20), and the substrate (20) uses the second vibration isolators (21) for vibration isolation. A displacement interferometer assembly (17) is incorporated into the optical subsystem, the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources. In addition, the optical subsystem and the workpiece table (18) adopt a method of independent vibration isolation, preventing vibration generated when the workpiece table (18) moves from being transferred to the optical subsystem, eliminating an error generated due to the vibration of the optical subsystem, thereby improving the precision of calibrating the plane grating (25).
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| JP2005017654 | BASE FOR MICROSCOPE |
Inventors:
WANG LEIJIE (CN)
ZHANG MING (CN)
ZHU YU (CN)
HAO JIANKUN (CN)
LI XIN (CN)
CHENG RONG (CN)
YANG KAIMING (CN)
HU JINCHUN (CN)
ZHANG MING (CN)
ZHU YU (CN)
HAO JIANKUN (CN)
LI XIN (CN)
CHENG RONG (CN)
YANG KAIMING (CN)
HU JINCHUN (CN)
Application Number:
PCT/CN2020/089949
Publication Date:
November 19, 2020
Filing Date:
May 13, 2020
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
BEIJING U PREC TECH CO LTD (CN)
BEIJING U PREC TECH CO LTD (CN)
International Classes:
G01M11/04; G01B11/02; G01M11/02
Domestic Patent References:
| WO2001035168A1 | 2001-05-17 |
Foreign References:
| CN110132550A | 2019-08-16 | |||
| CN108801158A | 2018-11-13 | |||
| CN103968757A | 2014-08-06 | |||
| CN103673891A | 2014-03-26 | |||
| EP0766068A2 | 1997-04-02 |
Other References:
WANG LEI-JIE , ZHANG MING , ZHU YU , LU SEN , YANG KAI-MING: "A displacement measurement system for ultra-precision heterodyne Littrow grating interferometer", GUANGXUE JINGMI GONGCHENG-OPTICS AND PRECISION ENGINEERING, vol. 25, no. 12, 31 December 2017 (2017-12-31), pages 2975 - 2985, XP009524305, ISSN: 1004-924X, DOI: 10.3788/OPE.20172512.2975
Attorney, Agent or Firm:
GRANDER IP LAW FIRM (CN)
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