Title:
PLASMA CVD DEVICE, DLC FILM, AND METHOD FOR DEPOSITING THIN FILM
Document Type and Number:
WIPO Patent Application WO/2010/001880
Kind Code:
A1
Abstract:
Provided is a plasma CVD device wherein the voltage VDC, i.e., the DC component generated at the electrode during high-frequency discharge in CVD deposition, can be increased. A plasma CVD device is characterized in that it comprises a chamber (1), a holding electrode (2) disposed in the chamber and adapted for holding a substrate on which a film is to be deposited, a high frequency power supply (8) connected electrically with the holding electrode, a counter electrode (12) arranged opposite to the substrate held by the holding electrode and connected with an earth electrode or a float electrode, a raw material gas supply mechanism for supplying a raw material gas into the space (13) between the counter electrode and the holding electrode, and an exhaust mechanism for exhausting the chamber, and that the following expression is satisfied. b/a≥2 where a is the surface area of the holding electrode, and b is the surface area of the counter electrode.
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Inventors:
HONDA, Yuuji (956-1, Nishi-hirai, Nagareyama-sh, Chiba 56, 〒2700156, JP)
本多 祐二 (〒56 千葉県流山市西平井９５６番地の１ 株式会社ユーテック内 Chiba, 〒2700156, JP)
KAWABE, Takeharu (956-1, Nishi-hirai, Nagareyama-sh, Chiba 56, 〒2700156, JP)
川邉 丈晴 (〒56 千葉県流山市西平井９５６番地の１ 株式会社ユーテック内 Chiba, 〒2700156, JP)
本多 祐二 (〒56 千葉県流山市西平井９５６番地の１ 株式会社ユーテック内 Chiba, 〒2700156, JP)
KAWABE, Takeharu (956-1, Nishi-hirai, Nagareyama-sh, Chiba 56, 〒2700156, JP)
川邉 丈晴 (〒56 千葉県流山市西平井９５６番地の１ 株式会社ユーテック内 Chiba, 〒2700156, JP)
Application Number:
JP2009/061919
Publication Date:
January 07, 2010
Filing Date:
June 30, 2009
Export Citation:
Assignee:
YOUTEC CO., LTD. (956-1, Nishi-hirai Nagareyama-sh, Chiba 56, 〒2700156, JP)
株式会社ユーテック (〒56 千葉県流山市西平井９５６番地の１ Chiba, 〒2700156, JP)
HONDA, Yuuji (956-1, Nishi-hirai, Nagareyama-sh, Chiba 56, 〒2700156, JP)
本多 祐二 (〒56 千葉県流山市西平井９５６番地の１ 株式会社ユーテック内 Chiba, 〒2700156, JP)
KAWABE, Takeharu (956-1, Nishi-hirai, Nagareyama-sh, Chiba 56, 〒2700156, JP)
株式会社ユーテック (〒56 千葉県流山市西平井９５６番地の１ Chiba, 〒2700156, JP)
HONDA, Yuuji (956-1, Nishi-hirai, Nagareyama-sh, Chiba 56, 〒2700156, JP)
本多 祐二 (〒56 千葉県流山市西平井９５６番地の１ 株式会社ユーテック内 Chiba, 〒2700156, JP)
KAWABE, Takeharu (956-1, Nishi-hirai, Nagareyama-sh, Chiba 56, 〒2700156, JP)
International Classes:
C23C16/509; H01L21/205
Attorney, Agent or Firm:
YANASE, Mutsuyasu et al. (PATENT ATTORNEYS SHINPO, 8th Floor UK Building, 1-32-14, Takadanobaba, Shinjuku-k, Tokyo 75, 〒1690075, JP)
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