Title:
PLASMA GENERATING APPARATUS, AND CLEANING/PURIFYING APPARATUS USING SAME
Document Type and Number:
WIPO Patent Application WO/2013/011762
Kind Code:
A1
Abstract:
A cleaning/purifying apparatus (40) detects abnormal events generated when a plasma generating apparatus (1) is used, and controls plasma discharge on the basis of the detection results.
Inventors:
NARITA KENJI
SANEMATSU WATARU
SANEMATSU WATARU
Application Number:
PCT/JP2012/064530
Publication Date:
January 24, 2013
Filing Date:
June 06, 2012
Export Citation:
Assignee:
PANASONIC CORP (JP)
NARITA KENJI
SANEMATSU WATARU
NARITA KENJI
SANEMATSU WATARU
International Classes:
C02F1/48; A61L2/18; B01J19/08; B08B3/08; B26B19/48; C02F1/50; C02F1/72; C02F1/78; H05H1/24; A45D27/46
Foreign References:
| JP2011056451A | 2011-03-24 | |||
| JP2002159973A | 2002-06-04 | |||
| JP2002331289A | 2002-11-19 | |||
| JPH0615788U | 1994-03-01 | |||
| JP2008307541A | 2008-12-25 | |||
| JPH07323289A | 1995-12-12 | |||
| JP2010063477A | 2010-03-25 | |||
| JP2004268003A | 2004-09-30 | |||
| JP2005296909A | 2005-10-27 | |||
| JP2010069030A | 2010-04-02 |
Attorney, Agent or Firm:
ITO, Masakazu et al. (JP)
Masakazu Ito (JP)
Masakazu Ito (JP)
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Claims:
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