PLASMA-GENERATING APPARATUS

WIPO Patent Application WO/2012/005201

A1

A plasma-generating apparatus (30) is provided with a radiofrequency wave-generating device (37) for generating radiofrequency waves and radiofrequency wave radiators (15) for radiating radiofrequency waves outputted from the radiofrequency wave-generating device (37) into a target space (10), and the supplying of radiofrequency wave energy from the radiofrequency wave radiators (15) into the target space (10) generates plasma. The radiofrequency wave-generating device (37) in the plasma-generating apparatus (30) is provided with an oscillator (41) for oscillating radiofrequency waves and amplifiers (42) for amplifying the radiofrequency waves oscillated by the oscillator (41) and outputting the same to the radiofrequency wave radiators (15). Of the oscillator (41) and amplifiers (42) in the radiofrequency wave-generating device (37), only the amplifiers (42) are integrated with the radiofrequency wave radiators (15).

IKEDA Yuji (Inc. 7-4-4, Minatojimaminami-machi, Chuo-ku, Kobe-sh, Hyogo 47, 〒6500047, JP)
池田　裕二 (〒47 兵庫県神戸市中央区港島南町７丁目４番４　イマジニアリング株式会社内 Hyogo, 〒6500047, JP)

JP2011/065252

January 12, 2012

July 04, 2011

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IMAGINEERING, Inc. (7-4-4, Minatojimaminami-machi Chuo-ku, Kobe-sh, Hyogo 47, 〒6500047, JP)
イマジニアリング株式会社 (〒47 兵庫県神戸市中央区港島南町７丁目４番４ Hyogo, 〒6500047, JP)
IKEDA Yuji (Inc. 7-4-4, Minatojimaminami-machi, Chuo-ku, Kobe-sh, Hyogo 47, 〒6500047, JP)

H05H1/24; F02P3/01; F02P15/00; F02P23/04; H01F38/12; H01T13/40; H05H1/46; H05H1/52

OIKE Bunpei (Inc. 7-4-4, Minatojimaminami-machi, Chuo-ku, Kobe-sh, Hyogo 47, 〒6500047, JP)

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