PLASMA-GENERATING APPARATUS - IMAGINEERING INC

Title:

PLASMA-GENERATING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2012/005201

Kind Code:

A1

Abstract:

A plasma-generating apparatus (30) is provided with a radiofrequency wave-generating device (37) for generating radiofrequency waves and radiofrequency wave radiators (15) for radiating radiofrequency waves outputted from the radiofrequency wave-generating device (37) into a target space (10), and the supplying of radiofrequency wave energy from the radiofrequency wave radiators (15) into the target space (10) generates plasma. The radiofrequency wave-generating device (37) in the plasma-generating apparatus (30) is provided with an oscillator (41) for oscillating radiofrequency waves and amplifiers (42) for amplifying the radiofrequency waves oscillated by the oscillator (41) and outputting the same to the radiofrequency wave radiators (15). Of the oscillator (41) and amplifiers (42) in the radiofrequency wave-generating device (37), only the amplifiers (42) are integrated with the radiofrequency wave radiators (15).

Inventors:

IKEDA YUJI (JP)
MAKITA MINORU (JP)

Application Number:

PCT/JP2011/065252

Publication Date:

January 12, 2012

Filing Date:

July 04, 2011

Export Citation:

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Assignee:

IMAGINEERING INC (JP)
IKEDA YUJI (JP)
MAKITA MINORU (JP)

International Classes:

H05H1/24; F02P3/01; F02P15/00; F02P23/04; H01F38/12; H01T13/40; H05H1/46; H05H1/52

Domestic Patent References:

WO2004064460A1

2004-07-29

Foreign References:

JP2009036198A	2009-02-19
JP2010001827A	2010-01-07
JP2005536684A	2005-12-02
JP2008175197A	2008-07-31
JP2009085038A	2009-04-23
JP2009537730A	2009-10-29
JP2009281188A	2009-12-03
JP2005183396A	2005-07-07

Other References: