PLASMA GENERATING DEVICE

WIPO Patent Application WO/2020/226086

A1

Provided is a plasma generating device with which it is possible to expand the degree of freedom for designing a preliminary electric discharge region, and to expand a plasma processing space. A plasma generating device 100 is provided with a preliminary discharge electrode 101, a common discharge electrode 104, and a main discharge electrode 120. The preliminary discharge electrode 101 is formed in the shape of an elongate rod in which a conducting wire 102 is accommodated in a preliminary discharge dielectric 103 made from a glass tube. The common discharge electrode 104 is configured as a plate-shaped body extending along the preliminary discharge electrode 101, and has formed therein a groove shaped electrode accommodating portion 105 which accommodates the preliminary discharge electrode 101 in an exposed state. Further, a plasma gas output port 106 consisting of a plurality of through holes for ejecting plasma gas is formed along the preliminary discharge electrode 101 in the common discharge electrode 104. The main discharge electrode 120 consists of a plate-shaped body extending along the common discharge electrode 104, and is arranged facing the common discharge electrode 104.　Figure 1

KAWAMURA NAOHISA (JP)
NAGATSU MASAAKI (JP)

PCT/JP2020/017916

November 12, 2020

April 27, 2020

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KUMETA MFG CO LTD (JP)
UNIV SHIZUOKA NAT UNIV CORP (JP)

H05H1/24; B01J19/08; C23C16/455; C23C16/505; C23C16/54; H01L21/3065

JP2002151295A	2002-05-24
JP2000167336A	2000-06-20
JP2007317501A	2007-12-06
JP2013089285A	2013-05-13
JP2007294414A	2007-11-08

ITO Hiroyuki (JP)

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