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Title:
PLASMA GENERATION DEVICE AND CLEANING DEVICE IN WHICH PLASMA GENERATION DEVICE IS USED
Document Type and Number:
WIPO Patent Application WO/2014/097549
Kind Code:
A1
Abstract:
A plasma generation device (1), provided with: a plasma generator (10), a plasma power supply unit (2), and a gas supply unit (3). The plasma generator includes a partition part (12) for dividing the liquid housing unit (15) and the gas housing unit (14) from each other. The partition part has a gas channel (13) for guiding the gas supplied from the gas supply unit and housed in the gas housing unit to the liquid housing unit. The first electrode (18) is disposed in the gas housing unit and the second electrode (19) is disposed in the liquid housing unit. The plasma power supply unit generates a potential supplied to the first and second electrodes and sets the potential of the second electrode to a lower value than that of the potential of the first electrode. The second electrode is formed from a material, a material compound, or a material mixture that causes sputtering phenomenon.

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Inventors:
SAKON, Shigetoshi
SANEMATSU, Wataru
Application Number:
JP2013/006935
Publication Date:
June 26, 2014
Filing Date:
November 26, 2013
Export Citation:
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Assignee:
PANASONIC CORPORATION (1006, Oaza-Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
International Classes:
H05H1/24; A45D27/46; B08B3/10; B08B7/00; B26B19/48
Domestic Patent References:
WO2013080435A1
Foreign References:
JP2012043769A
JP2008178870A
JP2012043769A
Other References:
See also references of EP 2934072A4
SATIKO OKAZAKI: "20th JSPF Annual Meeting", article "Atmospheric Pressure Glow Discharge Plasma and its Applications"
Attorney, Agent or Firm:
ONDA, Makoto et al. (12-1, Ohmiya-cho 2-chome Gifu-sh, Gifu 31, 〒5008731, JP)
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