PLASMA GENERATION DEVICE EQUIPPED WITH MEASURING DEVICE AND PLASMA PROPELLER

WIPO Patent Application WO/2015/166787

A1

Provided is a plasma generation device equipped with a measuring device and capable of stably and appropriately controlling the state of plasma, and also provided is a plasma propeller using the plasma generation device. A plasma generation device equipped with a measuring device according to the present invention is characterized by comprising: a discharge container (100) into which a gas is introduced and ionized to generate plasma; an emission monitor (200) for measuring plasma electron density using a plasma emission spectrum; a probe measuring device (205) for measuring the plasma electron density by a probe (204) disposed in the discharge container (100); a control device (203) for controlling at least one of the amount of power supplied to a cathode (103), the magnetic field distribution, and the amount of a supply gas on the basis of the measured results of the plasma electron density by the emission monitor (200) and the probe measuring device (205); and an optical axis drive unit (202) for changing the optical axis (X1) of the light incident into the emission monitor (200) from plasma.

AOI TATSUFUMI (JP)
YAMAGUCHI KENGO (JP)
MATSUDA RYUICHI (JP)
IKEDA AKIO (JP)
SHIMIZU HIROFUMI (JP)
YAMAZAKI TAKUYA (JP)
KIMURA TATSUYA (JP)

PCT/JP2015/061265

November 05, 2015

April 10, 2015

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MITSUBISHI HEAVY IND LTD (JP)

H05H1/00; F03H1/00; H05H1/46; H05H1/54

JP2000195810A	2000-07-14
JP2005228727A	2005-08-25

SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)

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