Title:
PLASMA GENERATION DEVICE NOZZLE, PLASMA GENERATION DEVICE, PLASMA SURFACE TREATMENT DEVICE, PLASMA GENERATION METHOD, AND PLASMA SURFACE TREATMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2007/105428
Kind Code:
A1
Abstract:
Provided is a plasma generation device nozzle capable of performing a surface
treatment (surface reforming, film formation, etc.) at an arbitrary position
and range without being constricted by a shape or size of an object and a plasma
generation device having the nozzle. A plasma generation device nozzle (1) has
an external electrode (21) formed in a tube shape on an outer circumference of
a dielectric cylinder (11) and an internal electrode (22) formed in a tube shape
on the inner circumference of the dielectric cylinder (11). The external electrode
(21) is formed in a tape shape having a predetermined width along the circumference
of the tip end of the dielectric cylinder (11). The internal electrode (22) is
formed almost entire internal circumferential surface of the dielectric cylinder
(11).
Inventors:
KURODA SHIN-ICHI (JP)
IKEDA MASARU (JP)
IKEDA MASARU (JP)
Application Number:
PCT/JP2007/053117
Publication Date:
September 20, 2007
Filing Date:
February 13, 2007
Export Citation:
Assignee:
UNIV GUNMA NAT UNIV CORP (JP)
DAIKYO SEIKO LTD (JP)
KURODA SHIN-ICHI (JP)
IKEDA MASARU (JP)
DAIKYO SEIKO LTD (JP)
KURODA SHIN-ICHI (JP)
IKEDA MASARU (JP)
International Classes:
C23C16/513; H05H1/26
Foreign References:
| JPH03219082A | 1991-09-26 |
Other References:
TAMURA K. ET AL.: "Ryutai Anteika Corona-gata Taikiatsu Teion Plasma Torch no Kaihatsu to Kobunshi Hyomen Shori eno Oyo", DAI 15 KAI KENKYU HAPPYOKAI. TOKUBETSU KOENKAI YOKOSHU, 2004, pages 101 - 102, XP003024586
Attorney, Agent or Firm:
HIRAISHI, Toshiko et al. (Nishi-Shinbashi 1-chome Minato-k, Tokyo 03, JP)
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