Title:
PLASMA GENERATOR, PLASMA PROCESSING APPARATUS USING SAME AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/117080
Kind Code:
A1
Abstract:
Disclosed is a plasma generator which is capable of efficiently generating both molecular ions and atomic ions by using a single ion source. By providing a channel for passing a refrigerant through and a heater for heating in a part of or throughout the wall defining the plasma chamber of the plasma source, or by providing a temperature-controlling plate in the vicinity of the plasma chamber in such a manner that the temperature-controlling plate is close to or in close contact with the plasma chamber, the gas temperature within the plasma chamber is controlled in situ, and thus there can be highly efficiently generated different ion species such as molecular ions and atomic ions without taking out the plasma source.
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Inventors:
ITO HIROYUKI
MIZUNO BUNJI
SASAKI YUICHIRO
MIZUNO BUNJI
SASAKI YUICHIRO
Application Number:
PCT/JP2005/009459
Publication Date:
December 08, 2005
Filing Date:
May 24, 2005
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
ITO HIROYUKI
MIZUNO BUNJI
SASAKI YUICHIRO
ITO HIROYUKI
MIZUNO BUNJI
SASAKI YUICHIRO
International Classes:
H01J27/02; H01J37/08; H01J37/317; H01J37/32; H01L21/265; H05H1/24; H05H1/46; (IPC1-7): H01L21/265; H01J27/02; H01J37/08; H01J37/317; H01J37/32; H05H1/24; H05H1/46
Domestic Patent References:
| WO2002048425A2 | 2002-06-20 |
Foreign References:
| JP2003303784A | 2003-10-24 |
Attorney, Agent or Firm:
Takamatsu, Takeshi (7-13 Nishi-Shimbashi 1-chom, Minato-ku Tokyo 03, JP)
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