Title:
PLASMA GENERATOR WITH AT LEAST ONE NON-METALLIC COMPONENT
Document Type and Number:
WIPO Patent Application WO/2016/092368
Kind Code:
A3
Abstract:
A plasma generator (1401) for an ion implanter is provided. The plasma generator includes an ionization chamber (1410) for forming a plasma that is adapted to generate a plurality of ions and a plurality of electrons. An interior surface (1420) of the ionization chamber is exposed to the plasma and constructed from a first non-metallic material. The plasma generator may include a thermionic emitter (1420a,b) with at least one surface which may or may not be exposed to the plasma, or an electron gun for generating a secondary plasma. The thermionic emitter may be constructed from a second non-metallic material. The plasma generator further may include an exit aperture (1430) for extracting at least one of the plurality of ions or the plurality of electrons from the ionization chamber to form at least one of an ion beam or an electron flux. The ion beam or the electron flux comprises substantially no metal. The first and second non-metallic materials can be the same or different from each other.
Inventors:
HORSKY THOMAS N (US)
HAHTO SAMI K (US)
HAHTO SAMI K (US)
Application Number:
PCT/IB2015/002449
Publication Date:
August 11, 2016
Filing Date:
December 08, 2015
Export Citation:
Assignee:
NISSIN ION EQUIPMENT CO LTD (JP)
International Classes:
H01J27/08; H01J37/08
Foreign References:
| US5857889A | 1999-01-12 | |||
| US20090001290A1 | 2009-01-01 | |||
| US20040031935A1 | 2004-02-19 | |||
| KR20080102830A | 2008-11-26 |
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